Kevin Chau

Title: Kevin Chau: Innovator in Pressure Sensor Technology

Introduction

Kevin Chau is a prominent inventor based in Beijing, China. He has made significant contributions to the field of sensor technology, particularly in the development of pressure sensors. With a total of 5 patents to his name, Chau's work focuses on creating reliable and cost-effective solutions for high-temperature and high-pressure environments.

Latest Patents

One of Chau's latest patents is titled "Pressure gauge chip and manufacturing process thereof." This invention relates to a pressure sensor die and its fabrication process. The pressure sensor comprises a chamber that houses a pressure sensor die, which is uniformly compressed by the external pressure to be measured. The die can deform freely within the chamber and is primarily constructed of single crystalline silicon. It includes a substrate and a cap that are connected together, with a recess formed on the cap to create a sealed cavity with the substrate. A silicon oxide layer is formed between the substrate and the cap, and the substrate contains multiple piezoresistive sensing elements located inside the sealed cavity. This design enhances the sensor's immunity to temperature effects, making it particularly suitable for high-temperature, high-pressure environments while delivering accurate and reliable pressure measurements at a low cost.

Another notable patent is the "Method of making a dual-cavity pressure sensor die." This invention describes a pressure sensor die that is especially suitable for high-temperature and high-pressure operating environments. The die is constructed from single crystalline silicon and includes a cap, a substrate, and a base that are interconnected. A recess on the cap creates an upper sealed cavity with the substrate, while a recess on the base forms a lower sealed cavity. The overlapping projections of these cavities allow for at least two sets of piezoresistive sensing elements to be positioned within, oriented in different crystallographic directions. This innovative design further enhances the accuracy and reliability of pressure measurements.

Career Highlights

Kevin Chau is affiliated with the Chinese Academy of Sciences, where he continues to advance his research and development in sensor technology. His work has garnered attention for its practical applications and innovative approaches to solving complex engineering challenges.

Collaborations

Chau collaborates with notable colleagues, including Man Yu Wong and Yiming Zhang, who contribute to his research endeavors and help drive innovation in the field.

Conclusion

Kevin Chau's contributions to pressure sensor technology exemplify the importance of