This inventor holds 3 USPTO granted patents. Top assignees: Samsung Electronics Ltd., Samsung Electronics Co., Ltd.. Active years: 2026.
Company Filing History:
2 out of 5,708 
1 out of 132,107 
Years Active: 2026
Title: Keonhee Lim - Innovator in Semiconductor Processing Technologies
Introduction
Keonhee Lim is an inventor based in Suwon-si, South Korea. He is focused on developing advanced technologies in the field of semiconductor processing. Although he currently holds no granted patents, his innovative ideas are reflected in his latest patent applications.
Latest Patent Applications
1. **SEMICONDUCTOR PROCESS DEVICE AND METHOD OF MONITORING SEMICONDUCTOR PROCESS** - This application describes a semiconductor process device that includes a housing with a chamber for substrate processing. It features a viewport, an adapter for receiving reflected light, a polarization beam splitter, a spectroscope for analyzing spectra, and a control unit for monitoring the thickness of a structure based on luminous intensity over time at various wavelengths.
2. **PLASMA LIGHT DETECTION SYSTEM INCLUDING A SCINTILLATING WINDOW** - This application outlines a substrate processing apparatus with a process chamber and a stage for supporting a substrate. It includes a window with a scintillator layer that converts ultraviolet light emitted by plasma into visible light. This allows for the analysis of plasma by comparing light passing through the scintillator with light passing through the bare window.
Conclusion
Keonhee Lim is an emerging inventor whose work in semiconductor processing technologies shows great promise. His latest patent applications highlight his innovative approach to monitoring and analyzing semiconductor processes.