This inventor holds 1 USPTO granted patent and 2 published patent applications. Top assignee: Hoya Corporation. Active years: 2014.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2014
Title: Kenta Tsukagoshi – Innovator in Reflective Mask Technology
Introduction
Kenta Tsukagoshi is a prominent inventor based in Shinjuku-ku, Japan. With a focus on advancing technology in the field of photolithography, he has made significant contributions through his innovative patents. Tsukagoshi is recognized for his dedication to solving complex problems within the industry, particularly in the manufacturing of reflective masks.
Latest Patents
Tsukagoshi holds a patent for a reflective mask blank, along with a method for its manufacturing, aimed at addressing the issue of reduction in accumulated energy due to backward scattering. This issue often leads to a degradation in critical dimension (CD) linearity, particularly when high-contrast resists are used in the production of reflective masks. His invention includes a substrate, a multilayer reflective film designed to reflect exposure light, and an absorber film that absorbs the exposure light. Notably, the resist film for electron beam writing formed on the absorber film has a contrast value of 30 or less, showcasing the innovative characteristics of his patent.
Career Highlights
Kenta Tsukagoshi is currently employed by Hoya Corporation, a leading organization known for its expertise in optical products and innovative technologies. His work at Hoya Corporation allows him to leverage his skills and knowledge to contribute significantly to the field of optics and semiconductor manufacturing.
Collaborations
Throughout his career, Tsukagoshi has collaborated with esteemed colleagues such as Masahiro Hashimoto and Kazunori Ono. Their teamwork within Hoya Corporation has fostered a collaborative environment that supports the inventive processes and enhances the effectiveness of their advancements in reflective mask technology.
Conclusion
Kenta Tsukagoshi stands out as an accomplished inventor with a focus on improving manufacturing processes in the optics industry. His patent for a reflective mask blank signifies his commitment to innovation and problem-solving, which is crucial for progress in semiconductor technology. With continued dedication and collaboration, Tsukagoshi's contributions are poised to make a lasting impact on the field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile