Kenneth J Bahng

Title: The Innovative Contributions of Kenneth J Bahng

Introduction

Kenneth J Bahng is a notable inventor based in Cupertino, California, recognized for his significant contributions to the field of technology and engineering. With a total of five patents to his name, Bahng has made strides in developing advanced apparatuses for substrate processing.

Latest Patents

Among his latest patents is the "Apparatus for efficient removal of halogen residues from etched substrates." This innovative apparatus is designed to remove volatile residues from a substrate, featuring a chamber that maintains a vacuum and a heat module for heating the substrate. The design includes a temperature-controlled pedestal and substrate holders that enhance the efficiency of the residue removal process. Another notable patent is the "Substrate temperature measurement by infrared transmission." This method and apparatus allow for accurate measurement of substrate temperature during thermal processes by detecting changes in transmittance as the substrate is heated.

Career Highlights

Kenneth J Bahng has had a distinguished career, working with leading companies in the technology sector. He has been associated with Applied Materials, Inc. and Lam Research Corporation, where he contributed to various innovative projects and advancements in substrate processing technologies.

Collaborations

Throughout his career, Bahng has collaborated with talented individuals, including Matthew Fenton Davis and Travis Morey. These collaborations have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.

Conclusion

Kenneth J Bahng's contributions to the field of technology through his patents and collaborations highlight his role as a significant inventor. His work continues to influence advancements in substrate processing and measurement techniques.