Location History:
- Nirasaki, JP (2011)
- Yamanashi, JP (2012)
- Miyagi, JP (2007 - 2019)
Company Filing History:
Years Active: 2007-2019
Title: Kenji Sato: Innovator in Plasma Processing Technology
Introduction
Kenji Sato, an accomplished inventor based in Nirasaki, Japan, has made significant contributions to the field of plasma processing technology. With a total of five patents to his name, Sato's work focuses on advanced apparatuses that enhance the efficiency and effectiveness of plasma applications.
Latest Patents
Sato's latest innovations include two notable patents: the Plasma Processing Apparatus and the Probe Apparatus. The Plasma Processing Apparatus employs a high frequency power supply capable of turning power ON and OFF, distributing it to either an upper or lower electrode. This sophisticated design incorporates a matching circuit and a power transmission line, allowing for precise electrical characteristic measurements via a probe detector. A processing unit further enhances the system by sampling measurement signals, generating sample values, and selecting detection values to optimize plasma processing.
In addition, the Plasma Processing Apparatus and Feeder Rod used therein represents another of Sato's advancements. This innovative feeder rod transmits radio-frequency power to a susceptor within a processing chamber, where plasma generation occurs. The design integrates electrical characteristics measurement probes, allowing for a detachable installation between various components, thereby simplifying maintenance and enhancing operational flexibility.
Career Highlights
Throughout his career, Kenji Sato has worked with prominent companies such as Tokyo Electron Limited and NEC Corporation. His experience in these organizations has allowed him to refine his expertise in the field of plasma technology, contributing to his growth as an inventor.
Collaborations
Sato has collaborated with notable colleagues, including Taichi Hirano and Masataka Goto, further enhancing his development of innovative technologies in plasma processing.
Conclusion
Kenji Sato's contributions to plasma processing technology, highlighted by his recent patents, demonstrate his commitment to innovation and improvement in the industry. His career reflects a blend of experience and collaboration that continues to shape the future of plasma applications in various fields.