Nirasaki, Japan

Kenji Nebuka


Average Co-Inventor Count = 3.7

ph-index = 4

Forward Citations = 444(Granted Patents)


Company Filing History:


Years Active: 1994-1998

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4 patents (USPTO):Explore Patents

Title: The Innovative Mind of Kenji Nebuka

Introduction

Kenji Nebuka, an accomplished inventor based in Nirasaki, Japan, has made significant strides in his field through his innovative work. With a total of four patents to his name, Nebuka's contributions to technology continue to shape the landscape of modern inventions.

Latest Patents

Among his latest patents is a highly specialized treatment apparatus. This apparatus features an integral heater that includes an insulator designed to carry the to-be-treated object, utilizing a resistance heating element for effective heating. Additionally, it encompasses an electrical supply mechanism with feeders that extend into the treatment chamber, ensuring optimal connection to the resistance heating element. This design is aimed at improving efficiency in the treatment process.

Another notable patent is related to a load-lock unit and wafer transfer system. This invention facilitates the seamless transfer of wafers between two different atmospheric conditions. It includes a load-lock chamber with a holding mechanism for maintaining the wafer's position, a rotating mechanism for precise orientation, and an error detecting mechanism that utilizes light data to ensure accurate handling of the wafer. These features underscore Nebuka's commitment to advancing technology in wafer processing.

Career Highlights

Kenji Nebuka has dedicated his career to innovation, contributing to transformative projects at Tokyo Electron Limited. His work primarily revolves around improving the efficiency and effectiveness of treatment apparatuses and wafer transfer systems, positioning him as a leading figure in the field of semiconductor manufacturing.

Collaborations

Working alongside talented colleagues like Tetsu Oosawa and Teruo Asakawa, Nebuka has fostered a collaborative environment that encourages creativity and innovation. The synergy between these individuals has led to the development of cutting-edge technologies that benefit the industry as a whole.

Conclusion

With four patents and a commitment to innovation, Kenji Nebuka continues to make a notable impact in the field of technology. His work at Tokyo Electron Limited exemplifies the intersection of creativity and engineering, setting the stage for future advancements in treatment systems and wafer processing technologies.

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