Kenji Eto

Title: Kenji Eto: Innovator in Vacuum Processing Technology

Introduction

Kenji Eto is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of vacuum processing technology. His innovative work has led to the development of a unique vacuum processing apparatus that enhances plasma processing efficiency.

Latest Patents

Kenji Eto holds 1 patent for his invention titled "Vacuum processing apparatus and method of cleaning vacuum processing apparatus." This patent describes a vacuum processing apparatus designed to perform plasma processing. The apparatus includes an electrode flange, a shower plate, an insulating shield, a processing chamber for the substrate, an electrode frame, and a slide plate. The design allows the electrode frame and slide plate to slide in response to thermal deformation, ensuring optimal performance during temperature fluctuations.

Career Highlights

Kenji Eto is currently employed at Ulvac, Inc., a company known for its advanced vacuum technology solutions. His work at Ulvac has positioned him as a key player in the development of innovative vacuum processing systems. His expertise in this area has contributed to the company's reputation for excellence in vacuum technology.

Collaborations

Kenji Eto has collaborated with notable colleagues, including Takehisa Miyaya and Yosuke Jimbo. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas within the field of vacuum processing.

Conclusion

Kenji Eto's contributions to vacuum processing technology exemplify his dedication to innovation and excellence. His patent and work at Ulvac, Inc. highlight his role as a leading inventor in this specialized field.