Company Filing History:
Years Active: 2018-2024
Title: Kenichiro Yamada: Innovator in Substrate Processing Technology
Introduction
Kenichiro Yamada is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 4 patents. His work focuses on developing advanced systems and methods that enhance the efficiency and precision of substrate processing.
Latest Patents
Yamada's latest patents include a substrate processing system and a temperature control method. This innovative substrate processing system comprises a substrate processing apparatus and a control device. The apparatus features a chamber and a placing table that accommodates a substrate. The placing table consists of a base and an electrostatic chuck, which is equipped with multiple division regions, each containing a heater. The control device measures the resistance value of the heaters in each division region, estimates their temperatures, and regulates the power supplied to the heaters accordingly.
Another notable patent is a temperature measurement device that includes a light emitting part with two light sources. One outputs measurement light, while the other provides reference light. The device measures temperature based on the amount of reflected light received from a temperature sensing device, which alters its light transmission characteristics with temperature changes. This technology allows for precise temperature adjustments of the light sources.
Career Highlights
Kenichiro Yamada is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing substrate processing technologies, contributing to the overall efficiency of semiconductor production.
Collaborations
Yamada collaborates with talented coworkers, including Takari Yamamoto and Yoshiki Yamakawa. Their combined expertise fosters innovation and drives the development of cutting-edge technologies in their field.
Conclusion
Kenichiro Yamada's contributions to substrate processing technology exemplify his dedication to innovation. His patents reflect a commitment to enhancing the efficiency and precision of semiconductor manufacturing processes. Through his work at Tokyo Electron Limited, Yamada continues to influence the industry positively.