Company Filing History:
Years Active: 2021-2025
Title: **Kenichiro Nakamura: Innovator in Substrate Processing Technology**
Introduction
Kenichiro Nakamura, an accomplished inventor based in Miyagi, Japan, has made significant contributions to the field of substrate processing technology. With a total of three patents to his name, Nakamura's innovations have the potential to enhance efficiency and precision in various industrial applications.
Latest Patents
Among his most recent inventions are two prominent patents focusing on substrate processing systems and methods. The first patent, titled "Substrate Processing System and Temperature Control Method," describes a sophisticated substrate processing apparatus that includes a chamber and a placing table featuring an electrostatic chuck. This design incorporates multiple division regions, each equipped with a heater and a control device that measures the resistance values of these heaters, estimating temperatures accordingly to optimize the heating process.
The second patent, "Substrate Processing System and Substrate Processing Method," outlines a dynamic heating system. It features a stage for substrate placement, a heater for controlled heating, a power supply part, and a sensor that measures the heater's resistance values. The controller not only stores a conversion table linking resistance values to temperatures but also calibrates the power supply based on measured values and reference points. These inventions highlight Nakamura's commitment to advancing substrate processing techniques through innovative control methods.
Career Highlights
Kenichiro Nakamura is currently associated with Tokyo Electron Limited, a leader in the semiconductor manufacturing equipment sector. His work focuses on developing cutting-edge technologies that improve the manufacturing processes of semiconductors, contributing significantly to the industry's advancements. Nakamura's expertise in substrate processing and control mechanisms showcases his innovative spirit and technical proficiency.
Collaborations
Throughout his career, Nakamura has collaborated with talented professionals, including his esteemed coworkers Takari Yamamoto and Noriki Masuda. This collaboration further emphasizes the importance of teamwork and collective creativity in driving technological innovation and staying ahead in a competitive field.
Conclusion
In summary, Kenichiro Nakamura stands out as a notable inventor whose work in substrate processing technology continues to influence the semiconductor industry. With a strong background and a dedication to innovation, his patents not only depict his technical acumen but also offer promising solutions for the challenges faced in substrate processing. As technology evolves, Nakamura's contributions will certainly resonate in the future advancements within the industry.