Company Filing History:

11 out of 4,916

Ngk Insulators, Inc.

Years Active: 2015-2025

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12 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12284729 - Ceramic heater with shaft (2025-04-21),

2. 12230526 - Electrostatic chuck heater (2025-02-18),

3. 12108499 - Ceramic heater with shaft (2024-10-01),

4. 12087613 - Wafer placement table and method of manufacturing the same (2024-09-10),

5. 12027385 - Ceramic heater (2024-07-02),

6. 11951583 - Electrostatic chuck with high insulation performance and electrostatic attraction force (2024-04-09),

7. 11948825 - Wafer placement table (2024-04-02),

8. 11837490 - Electrostatic chuck heater (2023-12-05),

9. 11610798 - Electrostatic chuck assembly, electrostatic chuck, and focus ring (2023-03-21),

10. 11282734 - Electrostatic chuck and method for manufacturing the same (2022-03-22),

11. 9202718 - Electrostatic chuck (2015-12-01),

12. 9184081 - Electrostatic chuck (2015-11-10),

Title: Kenichiro Aikawa: Innovator in Ceramic Heating Technology

Introduction

Kenichiro Aikawa is a prominent inventor based in Handa, Japan, known for his significant contributions to ceramic heating technology. With a total of 12 patents to his name, Aikawa has developed innovative solutions that enhance the efficiency and functionality of heating systems.

Latest Patents

Among his latest patents, Aikawa has designed a ceramic heater with a shaft. This invention features a ceramic plate with an embedded resistance heating element and a hollow ceramic shaft bonded to the opposite side of the wafer placement surface. The design includes a conductive film extending along the internal circumferential surface of the ceramic shaft, along with a recessed section that connects the terminal of the resistance heating element to the conductive film. Another notable patent is the electrostatic chuck heater, which comprises an electrostatic chuck with an embedded electrode, a cooling member, and a heater layer containing multiple metal layers with resistance heating elements. This heater layer is designed with a ceramic insulating layer that ensures optimal performance.

Career Highlights

Aikawa has worked with reputable companies such as NGK Insulators, Inc. and NGL Insulators, Ltd. His experience in these organizations has allowed him to refine his expertise in ceramic materials and heating technologies.

Collaborations

Throughout his career, Aikawa has collaborated with talented individuals, including Tatsuya Kuno and Hiroshi Takebayashi. These partnerships have contributed to the advancement of his innovative projects.

Conclusion

Kenichiro Aikawa's work in ceramic heating technology showcases his dedication to innovation and excellence. His patents reflect a deep understanding of materials and engineering, making him a significant figure in the field.

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Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.