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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12230526 B1

PDFFull Text
Date of Patent:
Feb. 18, 2025

Filed:

Oct. 20, 2021

Electrostatic chuck heater

Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Tatsuya Kuno, Nagoya, JP;

Hiroshi Takebayashi, Handa, JP;

Kenichiro Aikawa, Handa, JP;

Assignee:

NGK INSULATORS, LTD., Nagoya, JP;

Attorney:

BURR PATENT LAW, PLLC

Primary Examiner:

Thienvu V Tran

Assistant Examiner:

Sreeya Sreevatsa

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01); H05B 3/28 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H05B 3/283 (2013.01);
Abstract

An electrostatic chuck heater includes an electrostatic chuck including an electrostatic electrode embedded in a ceramic sintered body, a cooling member cooling the electrostatic chuck, and a heater layer disposed between the electrostatic chuck and the cooling member and including a plurality of metal layers embedded therein in multiple stages, the metal layers including resistance heating element layers. The heater layer includes a ceramic insulating layer with a thickness of 2 μm or more and 50 μm or less between the metal layers.

Find Patent Forward Citations

Kuno, Tatsuya. (2025). Electrostatic chuck heater (U.S. Patent No. 12230526). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12230526

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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