Kenichi Sano

Title: Kenichi Sano: Innovator in Substrate Processing Technologies

Introduction

Kenichi Sano is a notable inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 2 patents. His innovative approaches have advanced the methods used in various industrial applications.

Latest Patents

Kenichi Sano's latest patents include an "Apparatus and method for performing predetermined processing on substrate with ultrasonic waves." This invention involves a blocking plate positioned opposite a substrate held by multiple chuck pins. A processing liquid is supplied to a space between the substrate's front surface and the blocking plate, achieving a liquid-tight state. While maintaining this state, both the substrate and the blocking plate rotate. Ultrasonic vibrations are injected into the processing liquid, allowing for uniform processing of the substrate while minimizing damage.

Another significant patent is the "Substrate processing method using alkaline solution and acid solution." This method effectively removes particles from the substrate surface through the physical action of droplet injection or megasonic vibrations. Additionally, metal contaminants are converted to hydroxides using an alkaline solution and subsequently dissolved with an acid solution. This dual approach allows for rapid substrate processing while reducing etching.

Career Highlights

Kenichi Sano is currently employed at Dainippon Screen Mfg. Co., Ltd., where he continues to develop innovative technologies in substrate processing. His work has been instrumental in enhancing the efficiency and effectiveness of various industrial processes.

Collaborations

Kenichi collaborates with Akira Izumi, contributing to the advancement of substrate processing technologies. Their combined expertise has led to significant innovations in the field.

Conclusion

Kenichi Sano's contributions to substrate processing through his patents and collaborative efforts highlight his role as a key innovator in the industry. His work continues to influence the development of advanced processing techniques.