Apparatus and method for performing predetermined processing on substrate with ultrasonic waves

Abstract

A blocking plateis disposed opposing a substrate W which is held by plural chuck pinsand a processing liquid is supplied from a processing liquid nozzleto a space SP between the front surface Wf of the substrate and an opposed surfaceof the blocking plate, whereby the processing liquid attains the liquid-tight state. While the liquid-tight state with the processing liquid is maintained, the substrate W and the blocking platerotate. In this condition, a liquid (pure water) to which ultrasonic vibration has propagated is injected from an ultrasonic nozzleapproximately perpendicular to a side wall surfaceof the blocking plate. While the ultrasonic vibration spreads inside the blocking platealong the horizontal direction, some vibrational waves spread uniformly and widely from the opposed surfaceto the processing liquid attaining the liquid-tight state and vibrate the processing liquid. This prevents concentration of the vibrational energy at the front surface Wf, which makes it possible to uniformly process the substrate W while suppressing damage to the substrate W.