Location History:
- Sagamihara, JP (1984 - 1989)
- Yokohama, JP (1981 - 1994)
- Kawasaki, JP (1993 - 2000)
Company Filing History:
Years Active: 1981-2000
Title: **Kenichi Kawashima: Innovator in Semiconductor Technology**
Introduction
Kenichi Kawashima is a prominent inventor based in Kawasaki, Japan, recognized for his contributions to semiconductor technology. With an impressive portfolio of 11 patents, he has made significant advancements in methods and apparatuses utilized in the fabrication of semiconductor devices. His inventions are pivotal in enhancing the efficiency and precision of semiconductor manufacturing processes.
Latest Patents
Kawashima's latest patents showcase his expertise in the semiconductor field. One of his notable patents is a "Method of fabricating a semiconductor device using a CMP process." This invention features a sophisticated polishing apparatus equipped with a rotatable platen, a polishing head, and a unique cleaning system that effectively utilizes an acid-based cleaning liquid to dissolve manganese oxide. This innovation aims to enhance the quality and reliability of semiconductor devices during manufacturing.
Another significant patent from Kawashima is the "Reflection type photomask and reflection type photolithography method." This patent introduces a reflection type photomask designed with a substrate and a concavo-convex reflecting surface, which includes two regions that create a relative height difference. This structure allows for the generation of a predetermined phase difference in the light reflected from different regions, thus improving the pattern formation on a photoresist layer during the photolithography process.
Career Highlights
Kenichi Kawashima's career has been closely associated with Fujitsu Corporation, where he has contributed immensely to research and development in semiconductor technologies. His innovative approaches and relentless pursuit of excellence have positioned him as a key figure within the industry. Kawashima's work not only reflects his own creativity but also the collective advancement of semiconductor technologies worldwide.
Collaborations
Throughout his career, Kawashima has collaborated with notable engineers and inventors, including Yasushi Takahashi and Koichi Kobayashi. Their combined expertise has led to a dynamic exchange of ideas and the successful development of groundbreaking technologies in the semiconductor sector.
Conclusion
Kenichi Kawashima stands out as an influential inventor whose contributions to semiconductor technology have far-reaching implications. Through his innovative patents, he has played a crucial role in shaping the future of semiconductor fabrication, ultimately supporting advancements in various electronic devices. His dedication to research and collaboration continues to inspire the next generation of inventors and engineers in the field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.