Location History:
- Tokyo-To, JP (2009)
- Nirasaki, JP (2011)
- Miyagi, JP (2019 - 2023)
Company Filing History:
Years Active: 2009-2023
Title: Kengo Kaneko: Innovator in Temperature Control Technology
Introduction
Kengo Kaneko is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of temperature control technology, holding a total of 7 patents. His innovative work focuses on enhancing the accuracy and efficiency of temperature control systems.
Latest Patents
Among his latest patents are a temperature controlling apparatus and a plasma processing apparatus. The temperature controlling apparatus is designed to maintain high accuracy in temperature control of a processing target substrate, even when heaters are disconnected. This apparatus includes an electronic chuck, multiple heaters embedded within it, and a controller that adjusts the current flowing through the heaters based on their operational status. The plasma processing apparatus features an external circuit connected to an electrical component in a processing chamber, equipped with a filter that mitigates noise interference. This filter utilizes a coil and a movable member to adjust the resonance frequencies, enhancing the performance of the apparatus.
Career Highlights
Kengo Kaneko is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing temperature control technologies that are critical for various industrial applications.
Collaborations
Throughout his career, Kaneko has collaborated with notable colleagues, including Katsuyuki Koizumi and Daisuke Hayashi. These collaborations have contributed to the development of innovative solutions in the field.
Conclusion
Kengo Kaneko's contributions to temperature control technology exemplify his dedication to innovation and excellence. His patents reflect a commitment to improving industrial processes and enhancing the efficiency of temperature management systems.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.