Company Filing History:
Years Active: 1994-1996
Title: Ken Tze-Kin Chan: Innovator in X-ray Mask Fabrication
Introduction
Ken Tze-Kin Chan is an accomplished inventor based in Wappingers Falls, NY, with a notable contribution to the field of lithography and semiconductor manufacturing. With two patents to his name, he has significantly advanced the technology surrounding X-ray mask fabrication.
Latest Patents
Chan's most recent patents showcase his expertise in aligning and registering patterns necessary for effective circuit creation. The first patent, titled "Registration and alignment technique for X-ray mask fabrication," introduces an innovative solution that incorporates alignment marks etched directly into the mask substrate. Using an electron beam lithography system, these marks are detectable from the front surface and facilitate precise pattern alignment. The second patent, "Registration of patterns formed of multiple fields," details a method to compensate for errors during the lithography process, allowing for the creation of larger chips through a mosaic pattern while maintaining alignment accuracy.
Career Highlights
Ken Tze-Kin Chan is associated with the International Business Machines Corporation (IBM), a leading technology company. His work reflects a deep understanding of complex lithography systems and the critical need for precision in semiconductor manufacturing.
Collaborations
Throughout his career, Chan has collaborated with notable professionals such as William A. Enichen and Donald E. Davis, pooling their expertise to enhance the capabilities of semiconductor fabrication technologies. These collaborations underscore the importance of teamwork in driving innovation within the industry.
Conclusion
In summary, Ken Tze-Kin Chan has made significant strides in improving the registration and alignment techniques in X-ray mask fabrication. His patents display not only his technical acumen but also a commitment to advancing semiconductor technology. As industries continue to evolve, innovations like those introduced by Chan will play a crucial role in shaping the future of electronic devices.