Company Filing History:
Years Active: 1998-2000
Title: Ken Edward Tokunaga: Innovator in Plasma Processing Technology
Introduction
Ken Edward Tokunaga is a notable inventor based in Fremont, CA (US). He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work focuses on improving the efficiency and effectiveness of plasma processing chambers, which are essential in various manufacturing processes.
Latest Patents
One of Tokunaga's latest patents is for an improved focus ring designed for use in a plasma processing chamber. This focus ring is configured to overlap a portion of a substrate-holding chuck that is powered by radio frequency (RF) power during plasma operation, acting as an electrode. The design includes an upper surface exposed to the plasma region, enhancing its functionality. Additionally, the chuck-overlapping portion is made from a first material with a lower dielectric constant than the rest of the focus ring, optimizing performance.
Another significant patent involves a substrate lifting arrangement for plasma processing chambers. This innovative system includes a substrate engaging element that can move between two positions: one where it does not engage the substrate and another where it lifts the substrate off the chuck. The arrangement also features an actuator that controls this movement and a resistance arrangement that limits current flow from the substrate to ground, addressing issues related to remaining electrical charges.
Career Highlights
Ken Edward Tokunaga is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop and refine technologies that are crucial for the advancement of plasma processing techniques.
Collaborations
Throughout his career, Tokunaga has collaborated with talented individuals such as Rajinder Dhindsa and Vikram Singh. These collaborations have contributed to the innovative solutions he has developed in the field of plasma processing.
Conclusion
Ken Edward Tokunaga's contributions to plasma processing technology through his patents and work at Lam Research Corporation highlight his role as a significant innovator in the industry. His advancements continue to influence the efficiency of manufacturing processes that rely on plasma technology.