Company Filing History:
Years Active: 2006-2009
Title: Kelly Hinckley: Innovator in Semiconductor Technology
Introduction
Kelly Hinckley is a prominent inventor based in Orlando, FL, known for her contributions to semiconductor technology. With a total of 3 patents, she has made significant advancements in processes that enhance the efficiency and effectiveness of integrated circuit structures and MEMS (Micro-Electro-Mechanical Systems).
Latest Patents
Hinckley's latest patents include a selective isotropic etch for titanium-based materials. This innovative process allows for the etching of a sacrificial layer of a structure using a plasma derived from nitrogen trifluoride. The selectivity of this process ensures that titanium-nitride and titanium are etched without affecting adjacent silicon dioxide or aluminum layers. This technology has applications in the formation of integrated circuit structures and MEMS structures.
Another notable patent involves methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching. This process entails exposing a semiconductor wafer to a microwave-energy-generated plasma of a primary gas mixture at relatively high temperatures, facilitating the removal of the photoresist layer. The method also includes determining an endpoint for removal based on changes in visible light from the chamber containing the wafer. This multi-step process enhances the efficiency of semiconductor manufacturing.
Career Highlights
Kelly Hinckley is currently employed at Agere Systems Inc., where she continues to innovate in the field of semiconductor technology. Her work has significantly impacted the industry, particularly in the development of processes that improve the manufacturing of electronic components.
Collaborations
Hinckley has collaborated with notable colleagues, including Timothy Scott Campbell and Daniel Patrick Chesire, contributing to a dynamic work environment that fosters innovation and creativity.
Conclusion
Kelly Hinckley stands out as a leading inventor in semiconductor technology, with her patents reflecting her commitment to advancing the field. Her work at Agere Systems Inc. and her collaborations with other professionals highlight her significant contributions to the industry.