Kelly A Colborne

Title: Kelly A. Colborne: Innovator in Vacuum Processing Systems

Introduction

Kelly A. Colborne is a prominent inventor based in San Jose, CA, known for her significant contributions to vacuum processing systems. With a total of 5 patents, she has made remarkable advancements in the field, particularly in the design and functionality of load-lock chambers and wafer staging systems.

Latest Patents

One of her latest patents is titled "Load-lock with external staging area." This invention provides a vacuum system featuring a small-volume load-lock chamber designed to support a substrate set of only two rows of substrates. The innovation allows for quick evacuation and venting of the load-lock chamber, ensuring a continuous feed. The system includes a transfer chamber, processing chambers, a substrate handling robot, and a load-lock chamber with substrate support members. Additionally, it incorporates a staging or storage rack that can temporarily store processed substrates for cooling, enhancing operational efficiency.

Another notable patent is "Front end wafer staging with wafer cassette turntables and on-the-fly." This invention introduces a method and apparatus for efficiently introducing and removing a set of wafers from a vacuum processing system. The system comprises a support platform, wafer cassette turntables, a wafer handler, and a wafer center finding device. The design aims to control particles in the vicinity of the wafers, ensuring a clean processing environment.

Career Highlights

Kelly A. Colborne is currently employed at Applied Materials, Inc., where she continues to innovate and develop advanced technologies in the semiconductor industry. Her work has significantly impacted the efficiency and effectiveness of vacuum processing systems.

Collaborations

Throughout her career, Kelly has collaborated with notable colleagues, including Kevin P. Fairbairn and Christopher F. Lane. These collaborations have fostered a creative environment that has led to groundbreaking advancements in their field.

Conclusion

Kelly A. Colborne is a trailblazer in the realm of vacuum processing systems, with her innovative patents paving the way for future advancements. Her contributions to the industry exemplify the importance of creativity and collaboration in driving technological progress.