Keisuke Tsugao

Title: Keisuke Tsugao: Innovator in Substrate Processing Technology

Introduction

Keisuke Tsugao is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 4 patents. His innovative work focuses on improving the efficiency and effectiveness of substrate processing apparatuses.

Latest Patents

Tsugao's latest patents include a substrate processing apparatus and a control method for such an apparatus. This invention features processing units that utilize chemicals to process substrates. The apparatus includes an exhaust path and a gas processing unit designed to remove target components from the exhaust gas. The gas processing unit is equipped with a duct, a partition plate made of porous material, and a liquid supply that dissolves the target component. The controller of the apparatus adjusts the flow rate of the dissolving liquid based on the operational status of the processing units.

Another notable patent is the substrate liquid processing apparatus. This apparatus consists of a liquid unit that processes substrates using multiple types of processing liquids. It features an exhaust pipe that allows exhaust gas to flow from the liquid processing unit, along with individual exhaust pipes corresponding to the different processing liquids. An exhaust switching unit is integrated to change the discharge destination of the exhaust gas, enhancing the overall processing efficiency.

Career Highlights

Keisuke Tsugao is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to develop and refine his innovative technologies in substrate processing.

Collaborations

Throughout his career, Tsugao has collaborated with talented individuals such as Tomonori Okumura and Junya Minamida. These collaborations have contributed to the advancement of substrate processing technologies and have fostered a creative environment for innovation.

Conclusion

Keisuke Tsugao is a distinguished inventor whose work in substrate processing technology has led to significant advancements in the field. His patents reflect a commitment to innovation and efficiency, making him a valuable contributor to the industry.