Kyoto, Japan

Keiji Toei


Average Co-Inventor Count = 4.0

ph-index = 4

Forward Citations = 443(Granted Patents)


Company Filing History:


Years Active: 1986-1993

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5 patents (USPTO):Explore Patents

Title: Keiji Toei: Innovator in Semiconductor Technology

Introduction

Keiji Toei is a prominent inventor based in Kyoto, Japan, known for his contributions to semiconductor technology. With a total of five patents to his name, Toei has made significant advancements in methods and apparatuses that enhance the efficiency and safety of semiconductor manufacturing processes.

Latest Patents

One of Toei's latest patents is a method of forming small through-holes in thin metal plates. This innovative technique involves several steps, including the formation of resist films with openings, etching the thin metal plate, and carefully controlling the etching process to prevent the formation of through-holes until the desired stage. The method also includes removing overhangs of the resist film using high-pressure fluid and applying an etch-resisting layer before finalizing the through-holes.

Another notable patent is an oxide film removing apparatus and its associated method. This invention focuses on removing a SiO₂ film from semiconductor substrates using a liquid mixture of hydrogen fluoride and methyl alcohol. By preparing this mixture in a chemical factory and heating it to generate azeotropic vapor, Toei's method enhances safety during operations at semiconductor works, making the process more efficient and secure.

Career Highlights

Throughout his career, Keiji Toei has worked with notable companies such as Dainippon Screen Mfg. Co., Ltd. and Dainippon Screen Manufacturing Co., Ltd. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor technology.

Collaborations

Toei has collaborated with esteemed colleagues, including Akira Izumi and Nobuatsu Watanabe. Their combined expertise has contributed to the advancement of semiconductor manufacturing processes and technologies.

Conclusion

Keiji Toei's contributions to the field of semiconductor technology through his innovative patents and collaborations have significantly impacted the industry. His work continues to influence the development of safer and more efficient manufacturing processes.

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