Location History:
- Nara, JP (1990 - 1992)
- Kitakatsuragi, JP (1993)
- Tenri, JP (1996)
Company Filing History:
Years Active: 1990-1996
Title: Keiji Tarui: Innovator in Thin Film Transistor Technology
Introduction
Keiji Tarui is a prominent inventor based in Nara, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the fabrication of thin film transistors. With a total of 4 patents to his name, Tarui's work has had a notable impact on the industry.
Latest Patents
One of Tarui's latest patents is a method for fabricating a thin film transistor. This method involves forming a semiconductor layer and a gate electrode on an insulating substrate, with a gate insulating film in between. The process includes implanting an impurity element into the semiconductor layer's surface by accelerating hydrogen ions and ions from group III or group V of the periodic table. This innovative approach allows for the simultaneous formation of source and drain regions while hydrogenating the channel region. The concentration of hydrogen ions in the channel region is carefully regulated between 1.times.10.sup.19 ions/cm.sup.3 and 1.times.10.sup.20 ions/cm.sup.3.
Another significant patent by Tarui is an electrode pattern forming method. This method consists of forming a transparent conductive film on a substrate, which is then covered with an aluminum film. A resist material film is applied for etching, followed by exposure and development to create a resist pattern. The aluminum film is then patterned using this resist pattern as a mask, showcasing Tarui's expertise in precise fabrication techniques.
Career Highlights
Keiji Tarui is associated with Sharp Kabushiki Kaisha Corporation, where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing the capabilities of thin film transistors, which are crucial for various electronic devices.
Collaborations
Throughout his career, Tarui has collaborated with notable colleagues, including Tatsuo Morita and Atsushi Yoshinouchi. These collaborations have further enriched his research and development efforts, leading to groundbreaking advancements in the industry.
Conclusion
Keiji Tarui's contributions to the field of thin film transistors exemplify his innovative spirit and dedication to advancing technology. His patents reflect a deep understanding of semiconductor fabrication processes, making him a key figure in the industry.