Company Filing History:
Years Active: 2021
Title: Keiichiro Urabe: Innovator in 3D NAND Flash Memory Technologies
Introduction
Keiichiro Urabe is a prominent inventor based in Ibaraki, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the development of methods for fabricating 3D NAND flash memory. His innovative approaches have paved the way for advancements in memory storage solutions.
Latest Patents
Urabe holds a patent for "Chemistries for etching multi-stacked layers." This patent discloses methods for fabricating 3D NAND flash memory. The method includes forming a hardmask pattern on the hardmask layer and using this pattern to create apertures in the alternating layers. This is achieved by selectively plasma etching the alternating layers versus the hardmask layer using a hydrofluorocarbon etching gas. The gases used include 1,1,1,3,3,3-hexafluoropropane (CHF), 1,1,2,2,3,3-hexafluoropropane (iso-CHF), 1,1,1,2,3,3,3-heptafluoropropane (CHF), and 1,1,1,2,2,3,3-heptafluoropropane (iso-CHF). The first etching layer comprises a material different from that of the second etching layer. Urabe has 1 patent to his name.
Career Highlights
Urabe is currently employed at L'air Liquide, Société Anonyme Pour L'étude Et L'exploitation Des Procédés Georges Claude. His work at this esteemed company has allowed him to focus on innovative solutions in the semiconductor industry. His expertise in etching technologies has been instrumental in enhancing the efficiency and effectiveness of memory fabrication processes.
Collaborations
Throughout his career, Urabe has collaborated with notable colleagues, including Peng Shen and Jiro Yokota. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.
Conclusion
Keiichiro Urabe is a key figure in the advancement of 3D NAND flash memory technologies. His innovative patent and contributions to the field highlight his importance as an inventor. His work continues to influence the semiconductor industry and drive future
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