This inventor holds 1 USPTO granted patent. Top assignee: Ngk Insulators, Inc.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Keiichi Yasui: Inventor of a Semiconductor-Processing Susceptor
Introduction
Keiichi Yasui is an inventor associated with Handa City, Japan, and NGK Insulators, Ltd. His listed patent work concerns equipment used in semiconductor manufacturing. The provided information credits him with 1 patent.
Latest Patents
Yasui’s listed invention, “Susceptor,” describes a component for a film deposition or etching apparatus. It includes a ceramic plate with a surface for placing a wafer and an embedded internal electrode, along with a cylindrical ceramic shaft attached to the plate’s opposite surface. A gas supply hole runs through the plate and shaft, and a porous plug is embedded in at least the portion of the hole within the ceramic plate. The design integrates wafer support and gas delivery in a ceramic structure.
Career Highlights
The available information connects Yasui’s patent activity with NGK Insulators, Ltd., a company whose work includes advanced ceramic technologies. His listed invention addresses a component used in processes for manufacturing semiconductor devices.
Collaborations
Reon Takanoya is identified as Yasui’s coworker. The provided details do not specify whether Takanoya collaborated on the susceptor patent.
Conclusion
Keiichi Yasui’s listed patent presents a ceramic susceptor design that combines wafer support with a gas supply path for film deposition or etching equipment.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile