The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Nov. 28, 2023
Ngk Insulators, Ltd., Nagoya City, JP;
Keiichi Yasui, Handa City, JP;
Reon Takanoya, Handa City, JP;
NGK INSULATORS, LTD., Nagoya, JP;
Abstract
There is provided a susceptor for a film deposition apparatus or for an etching apparatus, including a ceramic plate including a first surface on which a wafer is to be placed, and a second surface opposed to the first surface, and embedded with an internal electrode; a cylindrical ceramic shaft attached to the second surface of the ceramic plate; a gas supply hole penetrating through the ceramic plate and the ceramic shaft to extend from the first surface of the ceramic plate to a distal end of the ceramic shaft away from the ceramic plate through the second surface; and a porous plug embedded in a portion of the gas supply hole corresponding to at least the ceramic plate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile