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Pleasanton, CA, United States of America

Keechan Kim

USPTO Granted Patents = 11 (Patent Applications = 3)

Average Co-Inventor Count = 3.0

ph-index = 2

Forward Citations = 12(Granted Patents)

Location History:

Dublin, CA (US) (2012)
Pleasanton, CA (US) (2012 - 2020)

Company Filing History:

11 out of 3,777

Lam Research Corporation

Years Active: 2012-2025

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11 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12387915 - Lower plasma exclusion zone ring for bevel etcher (2025-08-12),

2. 10832923 - Lower plasma-exclusion-zone rings for a bevel etcher (2020-11-10),

3. 10811282 - Upper plasma-exclusion-zone rings for a bevel etcher (2020-10-20),

4. 10748747 - Edge exclusion control with adjustable plasma exclusion zone ring (2020-08-18),

5. 10629458 - Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter (2020-04-21),

6. 9799496 - Edge exclusion control with adjustable plasma exclusion zone ring (2017-10-24),

7. 9184030 - Edge exclusion control with adjustable plasma exclusion zone ring (2015-11-10),

8. 8852384 - Method and apparatus for detecting plasma unconfinement (2014-10-07),

9. 8398778 - Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter (2013-03-19),

10. 8257503 - Method and apparatus for detecting plasma unconfinement (2012-09-04),

11. 8137501 - Bevel clean device (2012-03-20),

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