The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Feb. 08, 2007
Yunsang Kim, Monte Sereno, CA (US);
Andrew Bailey, Iii, Pleasanton, CA (US);
Greg Sexton, Fremont, CA (US);
Keechan Kim, Dublin, CA (US);
Andras Kuthi, Thousand Oaks, CA (US);
Yunsang Kim, Monte Sereno, CA (US);
Andrew Bailey, III, Pleasanton, CA (US);
Greg Sexton, Fremont, CA (US);
Keechan Kim, Dublin, CA (US);
Andras Kuthi, Thousand Oaks, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An apparatus for removing material on a bevel of a wafer is provided. A wafer support with a diameter that is less than the diameter of the wafer, wherein the wafer support is on a first side of the wafer, and wherein an outer edge of the wafer extends beyond the wafer support around the wafer is provided. An RF power source is electrically connected to the wafer. A central cover is spaced apart from the wafer support. A first electrically conductive ring is on the first side of and spaced apart from the wafer. A second electrically conductive ring is spaced apart from the wafer. An electrically conductive liner surrounds the outer edge of the wafer. A switch is between the liner and ground, allowing the liner to be switched from being grounded to floating.