This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Kee Soo Park and Substrate Temperature Measurement
Introduction
Kee Soo Park is an inventor associated with Suwon-si, South Korea, and Samsung Electronics Ltd. His patent work addresses accurate temperature measurement during substrate processing.
Latest Patents
Park is named on 1 patent: “Substrate Temperature Measuring Device, Substrate Processing Apparatus Including the Same, and Substrate Temperature Measuring Method Using the Same.” The invention uses a sensor to detect light at three wavelengths emitted by a substrate. Calculators use the measured light to determine temperatures at those wavelengths, then estimate the substrate’s emissivity and reflected energy to calculate its temperature.
Career Highlights
Park’s listed invention concerns temperature sensing and control in substrate-processing equipment, an area relevant to semiconductor manufacturing. The available information associates his work with Samsung Electronics Ltd.
Collaborations
Yeon Tae Kim and Hun Yong Park are identified as Park’s coworkers. The provided information does not specify their roles in the patent.
Conclusion
Kee Soo Park’s listed patent presents a multiwavelength approach to estimating substrate temperature by accounting for emissivity and reflected energy.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile