Hwaseong-si, South Korea

Kee-soo Park

USPTO Granted Patents = 2 

Average Co-Inventor Count = 6.5

ph-index = 1

Forward Citations = 4(Granted Patents)


Company Filing History:


Years Active: 2019-2020

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2 patents (USPTO):Explore Patents

Title: Kee-soo Park: Innovator in Semiconductor Technology

Introduction

Kee-soo Park is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on methods that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Kee-soo Park's latest patents include innovative methods for inspecting semiconductor substrates and controlling deposition processes. The first patent describes a method of inspecting a semiconductor substrate that involves measuring the light intensity of light reflected on a rotating substrate. This method analyzes the frequency distribution of the measured light intensity to determine the state of the semiconductor substrate. The analysis includes extracting multiple frequency components corresponding to various frequencies from the measured light intensity.

The second patent presents a deposition process monitoring system designed to detect the internal state of a chamber during the deposition process. This system includes a facility cover that defines a space for the deposition process, a chamber covered with a translucent dome, and a support for the deposition target. It also features multiple lamps that supply radiant heat energy during the process and a laser sensor that detects the intensity of a laser beam transmitted through the dome. The state of by-products coating the dome is determined based on the detected intensity of the laser beam.

Career Highlights

Kee-soo Park is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in advancing the methods used in semiconductor manufacturing, contributing to the overall efficiency of the industry.

Collaborations

Throughout his career, Kee-soo Park has collaborated with notable colleagues, including Chang-yun Lee and Ju-hyun Lee. These collaborations have fostered innovation and have led to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Kee-soo Park is a key figure in semiconductor innovation, with a focus on improving manufacturing processes through his patented technologies. His contributions continue to shape the future of the semiconductor industry.

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