Kedarnath Sangam

Title: Kedarnath Sangam: Innovator in Epitaxial Reactor Technology

Introduction

Kedarnath Sangam is a prominent inventor based in Sunnyvale, California, known for his significant contributions to the field of epitaxial reactor technology. With a total of 18 patents to his name, he has made remarkable advancements in the deposition of thin films on semiconductor wafers.

Latest Patents

One of his latest patents is the high throughput multi-wafer epitaxial reactor. This innovative reactor enables the simultaneous deposition of thin films on multiple wafers. During the deposition process, several wafers are contained within a wafer sleeve, which consists of closely spaced wafer carrier plates to minimize the process volume. Process gases flow preferentially into the interior volume of the wafer sleeve, which is heated by one or more lamp modules. Purge gases flow outside the wafer sleeve within the reactor chamber to minimize deposition on the chamber walls. The sequencing of the illumination of the individual lamps in the lamp module may further enhance the linearity of variation in deposition rates within the wafer sleeve. To improve uniformity, the direction of process gas flow can be varied in a cross-flow configuration. By combining lamp sequencing with cross-flow processing in a multiple reactor system, high throughput deposition with good film uniformities and efficient use of process gases is achieved.

Career Highlights

Kedarnath Sangam has worked with notable companies in the semiconductor industry, including Applied Materials, Inc. and Crystal Solar, Inc. His experience in these organizations has contributed to his expertise in developing advanced technologies for wafer processing.

Collaborations

Throughout his career, he has collaborated with esteemed colleagues such as Alexander N. Lerner and Visweswaren Sivaramakrishnan. These collaborations have further enriched his work and innovations in the field.

Conclusion

Kedarnath Sangam's contributions to epitaxial reactor technology have significantly impacted the semiconductor industry. His innovative approaches and numerous patents reflect his dedication to advancing technology in this critical field.