Location History:
- Hitachinaka, JP (2004)
- Tokyo, JP (2008)
Company Filing History:
Years Active: 2004-2008
Title: Kazuyuki Tokorozuki: Innovator in Semiconductor Manufacturing
Introduction
Kazuyuki Tokorozuki is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding 2 patents that showcase his innovative approach to technology.
Latest Patents
His latest patents include a manufacturing method of semiconductor integrated circuit devices. This invention aims to provide a method that can detect off-specification faulty wafers in real time. An abnormality detection server stores apparatus log data outputted from semiconductor manufacturing apparatus that processes a semiconductor wafer. When a lot end signal is received, an abnormal data detector judges whether there are abnormal data in the apparatus log data. Upon detecting an abnormality, a detection result is outputted to an engineer PC and an operator terminal unit.
Another notable patent is a fabrication method of semiconductor integrated circuit devices. This method compares the average dimensions of resist patterns formed during exposure processing on semiconductor substrates with a target dimension. Depending on the drift between the dimensions and the target, exposure energy is corrected accordingly. This ensures that the exposure processing on semiconductor substrates is optimized for the next lot.
Career Highlights
Kazuyuki Tokorozuki is currently employed at Renesas Technology Corporation, where he continues to develop innovative solutions in semiconductor technology. His work has significantly impacted the efficiency and reliability of semiconductor manufacturing processes.
Collaborations
He has collaborated with notable coworkers such as Yoshiyuki Miyamoto and Toshihiro Nakajima, contributing to advancements in their field.
Conclusion
Kazuyuki Tokorozuki's contributions to semiconductor manufacturing through his patents reflect his dedication to innovation and excellence in technology. His work continues to influence the industry and pave the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.