This inventor holds 3 USPTO granted patents and 4 published patent applications. Top assignees: Hitachi-Kokusai Electric Inc., Kokusai Electric Corporation. Active years: 2016-2020.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
2 out of 1,258 
1 out of 706 
Years Active: 2016-2020
Title: Kazuya Nabeta: Innovator in Semiconductor Technology
Introduction
Kazuya Nabeta is a notable inventor based in Toyama, Japan, recognized for his contributions to semiconductor technology. With a total of three patents to his name, he has made significant advancements in substrate processing apparatuses and methods for manufacturing semiconductor devices.
Latest Patents
Nabeta's latest patents include a substrate processing apparatus and a method of manufacturing semiconductor devices. This innovative device is designed to provide a stable and highly reliable means of detecting damage or contact failures in various parts. It features a processing chamber for substrate processing, a heater for heating the substrate, and a substrate support that accommodates the heater within the processing chamber. Additionally, it includes a shaft for supporting the substrate support, a wire inserted through the shaft, a supporting unit for holding the wire, and a temperature detector connected to the supporting unit.
Another significant patent involves a substrate processing apparatus that ensures a substrate is placed at a predetermined position on a substrate support, even if the substrate is misaligned on a substrate transfer unit. This invention comprises a process chamber, a transfer chamber housing the substrate transfer unit, a substrate detecting unit, and a memory unit that stores reference position information. A controller generates detected position information to control the substrate transfer unit, ensuring precise placement of the substrate.
Career Highlights
Throughout his career, Kazuya Nabeta has worked with prominent companies in the semiconductor industry, including Hitachi Kokusai Electric Inc. and Kokusai Electric Corporation. His experience in these organizations has contributed to his expertise and innovative capabilities in the field.
Collaborations
Nabeta has collaborated with notable colleagues such as Naoki Ukae and Mitsunori Takeshita, further enhancing his work and contributions to semiconductor technology.
Conclusion
Kazuya Nabeta's innovative work in semiconductor technology, particularly through his patents, showcases his commitment to advancing the field. His contributions have the potential to significantly impact the efficiency and reliability of semiconductor manufacturing processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile