Kazuto Umeki

Title: Kazuto Umeki: Innovator in Substrate Processing Technology

Introduction

Kazuto Umeki is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of substrate processing technology, holding two patents that showcase his innovative approach to improving heating methods in substrate processing apparatuses.

Latest Patents

Umeki's latest patents include a substrate processing apparatus and a method of adjusting the substrate processing apparatus. This apparatus features multiple heating modules, each equipped with a table designed to heat substrates with various heated zones. Each table contains several heaters, which are independently controlled to generate heat for their respective zones. A control unit ensures that the integrated quantities of heat across the heated zones are consistent, both within each heating module and among different modules. This innovation allows for precise temperature control during the substrate's transition to the process temperature, enhancing the efficiency and effectiveness of the heating process.

Career Highlights

Kazuto Umeki has built a successful career at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work focuses on advancing substrate processing technologies, which are crucial for the production of high-quality semiconductor devices.

Collaborations

Umeki collaborates with esteemed colleagues, including Kenichi Shigetomi and Takeshi Saikusa. Their combined expertise contributes to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Kazuto Umeki's innovative work in substrate processing technology exemplifies the importance of precision and control in semiconductor manufacturing. His patents reflect a commitment to advancing the industry and improving production methods.