Kazusato Hara

Title: Kazusato Hara: Innovator in Semiconductor Technology

Introduction

Kazusato Hara is a notable inventor based in Ome, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on innovative methods for manufacturing semiconductor devices, which are crucial for modern electronics.

Latest Patents

Hara's latest patents include a method of manufacturing a semiconductor device. This method involves forming a stopper insulating film made of an organic film over a plug, followed by the successive formation of an insulating film and a hard mask. In the presence of a patterned resist film, the hard mask is dry etched, allowing for the transfer of an interconnection groove pattern. The resist film is then removed through ashing with oxygen plasma, resulting in the formation of the interconnection-groove-pattern-transferred hard mask. The organic film that constitutes the stopper insulating film is covered with the insulating film during this process. Finally, the insulating film, stopper insulating film, and hard mask are removed to create the groove pattern of interconnection. Hydrogen annealing may be conducted after the formation of the plug, or the stopper insulating film may be formed over the plug via an adhesion layer.

Career Highlights

Kazusato Hara has worked with prominent companies in the semiconductor industry, including Renesas Technology Corporation and Hitachi, Ltd. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor manufacturing.

Collaborations

Hara has collaborated with notable colleagues such as Keisuke Funatsu and Toshinori Imai. These collaborations have contributed to the advancement of semiconductor technology and the successful implementation of his patented methods.

Conclusion

Kazusato Hara is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the field. His innovative methods and collaborations with industry leaders highlight his impact on modern electronics.