Kazuo Tawarayama

Title: Kazuo Tawarayama: Innovator in Extreme Ultraviolet Light Technology

Introduction

Kazuo Tawarayama is a prominent inventor based in Tsukuba, Japan. He has made significant contributions to the field of extreme ultraviolet (EUV) light technology, holding a total of four patents. His work focuses on advancing the capabilities of EUV light sources, which are crucial for various applications, including semiconductor manufacturing.

Latest Patents

Tawarayama's latest patents include an "Extreme Ultraviolet Light Source Apparatus and Method of Adjusting the Same." This invention features a main body that includes a supply section for an extreme ultraviolet radiation seed and an emission part designed to emit extreme ultraviolet light. The apparatus also incorporates an excitation unit that generates plasma by exciting the radiation seed, along with an optical condensing unit that converges the emitted extreme ultraviolet light. Additionally, a trap is positioned between the excitation unit and the optical condensing unit, and a first positioning mechanism is connected to the trap to adjust its position and angle. A measuring unit is also included to assess the far field distribution image of the plasma based on the emitted extreme ultraviolet light, allowing for the operation of the positioning mechanism.

Another notable patent is the "Focus Monitoring Method." This method involves monitoring the focus position on a wafer's surface for an exposure apparatus that transfers patterns from a mask onto the wafer. The process includes tilting either the mask or the exposure area on the wafer and performing exposure while maintaining a relative angle. This technique results in the formation of two spurious resolution images of the mask's pattern, enabling the detection of the optimal focus position based on the middle point between the measured positions of these images.

Career Highlights

Kazuo Tawarayama is associated with Kabushiki Kaisha Toshiba, where he has been instrumental in developing innovative technologies related to extreme ultraviolet light. His expertise in this field has positioned him as a key figure in advancing semiconductor manufacturing processes.

Collaborations

Tawarayama has collaborated with notable colleagues, including Takuya Kouno and Tetsuro Nakasugi. Their combined efforts have contributed to the successful development of advanced technologies in the realm of extreme ultraviolet light.

Conclusion

Kazuo Tawarayama's contributions to extreme ultraviolet light technology have significantly impacted the semiconductor industry. His innovative patents and collaborations highlight his role as a leading inventor in