The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2011
Filed:
Nov. 08, 2005
Tetsuro Nakasugi, Yokohama, JP;
Kazuo Tawarayama, Yokosuka, JP;
Hiroyuki Mizuno, Yokohama, JP;
Takumi Ota, Kawasaki, JP;
Noriaki Sasaki, Yokohama, JP;
Tatsuhiko Higashiki, Fujisawa, JP;
Takeshi Koshiba, Yokohama, JP;
Shunko Magoshi, Tokyo, JP;
Tetsuro Nakasugi, Yokohama, JP;
Kazuo Tawarayama, Yokosuka, JP;
Hiroyuki Mizuno, Yokohama, JP;
Takumi Ota, Kawasaki, JP;
Noriaki Sasaki, Yokohama, JP;
Tatsuhiko Higashiki, Fujisawa, JP;
Takeshi Koshiba, Yokohama, JP;
Shunko Magoshi, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According to an aspect of the invention, there is provided an electron beam drawing apparatus comprising at least one stage of a deflection amplifier and a deflection unit, a first storage section which stores shot information at a drawing time, a second storage section which stores a correction table indicating a relation between the shot information and an output voltage of the deflection amplifier, and an adjusting section which adjusts an output of the deflection amplifier based on the correction table stored in the second storage section and the shot information stored in the first storage section.