This inventor holds 3 USPTO granted patents and 1 EPO patent. Top assignee: Samsung Mobile Display Co., Ltd.. Active years: 2011.
Location History:
- Kyunggi-do, KR (2011)
- Yongin, KR (2011)
- Yongin-si, KR (2011)
Company Filing History:
Years Active: 2011
Title: Kazuo Furuno: Innovator in Chemical Vapor Deposition Technology
Introduction
Kazuo Furuno is a notable inventor based in Gyeonggi, South Korea. He has made significant contributions to the field of chemical vapor deposition technology, holding a total of 3 patents. His innovative approaches have enhanced the efficiency and effectiveness of deposition methods used in various applications.
Latest Patents
Furuno's latest patents include a catalyst-enhanced chemical vapor deposition (CECVD) apparatus and a deposition method utilizing this technology. The first patent focuses on a CECVD apparatus where tension is applied to a catalyst wire to prevent sagging due to thermal deformation. This design also incorporates additional gas to avoid the generation of foreign materials. The apparatus features a process chamber, a showerhead for introducing process gas, a tensile catalyst wire structure, and a substrate for gas deposition. This innovation aims to eliminate non-uniform temperatures and film growth, thereby enhancing the durability of the catalyst wire.
The second patent presents a CECVD apparatus where the showerhead and catalyst support are separated. This design allows for excellent spacing between the showerhead, catalyst wire, and substrate, and it can be purged to prevent contaminants from forming on components operating at low temperatures. The apparatus includes a reaction chamber, a showerhead for introducing reaction gas, a catalyst wire for gas decomposition, a catalyst support, and a substrate support.
Career Highlights
Kazuo Furuno has worked with prominent companies such as Samsung Mobile Display Co., Ltd. and Samsung Display Co., Ltd. His experience in these organizations has contributed to his expertise in the field of chemical vapor deposition.
Collaborations
Furuno has collaborated with notable colleagues, including Hee Cheol Kang and Myoung-Soo Kim. Their joint efforts have further advanced the research and development of innovative deposition technologies.
Conclusion
Kazuo Furuno's contributions to chemical vapor deposition technology through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to impact the industry positively, paving the way for future innovations.