Company Filing History:
Years Active: 2017-2019
Title: Kazuhiro Teraoka: Innovator in Liquid Processing Technologies
Introduction
Kazuhiro Teraoka is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of liquid processing technologies, holding a total of 2 patents. His work focuses on improving substrate processing methods, which are crucial in various industrial applications.
Latest Patents
Teraoka's latest patents include a liquid processing apparatus and method, as well as a storage medium. The liquid processing apparatus is designed to hold and rotate a substrate within a substrate holding unit. It ejects an etching liquid while moving a main nozzle between two positions: one at the center of the substrate and another closer to the peripheral side. Additionally, it ejects the etching liquid from a sub nozzle at a higher flow rate than the main nozzle. His second patent involves a substrate processing apparatus that cleans an etched substrate using a polymer removing liquid. This method supplies various vapors and liquids, such as isopropyl alcohol and ammonia water, to the substrate before cleaning.
Career Highlights
Kazuhiro Teraoka is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work has positioned him as a key figure in the development of advanced liquid processing technologies.
Collaborations
Throughout his career, Teraoka has collaborated with talented individuals such as Jun Nonaka and Shogo Mizota. These collaborations have further enhanced the impact of his inventions in the industry.
Conclusion
Kazuhiro Teraoka's contributions to liquid processing technologies demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of substrate processing, which is vital for advancements in various technological fields.