Company Filing History:
Years Active: 2016-2019
Title: Kazuhiro Tadokoro: Innovator in Substrate Treatment and Exposure Technology
Introduction
Kazuhiro Tadokoro is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the fields of substrate treatment and exposure technology. With a total of two patents to his name, Tadokoro's work has had a notable impact on the industry.
Latest Patents
Tadokoro's latest patents include a substrate treating method and an exposure apparatus and method of manufacturing devices. The substrate treating method involves determining a treating condition for hydrophobizing a surface of a substrate based on a target regarding a dissolved area size in a resist pattern. This method ensures that the surface is treated before forming a resist film. The exposure apparatus includes a projection optical system that exposes a substrate to radiant energy. It features a temperature measuring device that monitors the temperature of the projection optical system and a controller that predicts changes in optical characteristics based on temperature variations.
Career Highlights
Throughout his career, Kazuhiro Tadokoro has worked with notable companies such as Canon and Screen Holdings. His experience in these organizations has allowed him to develop innovative technologies that enhance manufacturing processes.
Collaborations
Tadokoro has collaborated with esteemed colleagues, including Toshiyuki Yoshihara and Masashi Kanaoka. These partnerships have contributed to the advancement of his research and inventions.
Conclusion
Kazuhiro Tadokoro is a distinguished inventor whose work in substrate treatment and exposure technology continues to influence the industry. His patents reflect his commitment to innovation and excellence in engineering.