This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Kazuhiro Shiba: Innovator in Film Forming Technology
Introduction
Kazuhiro Shiba is a notable inventor based in Kikuchi, Japan. He has made significant contributions to the field of film forming technology, particularly through his innovative methods and systems.
Latest Patents
Kazuhiro Shiba holds a patent for a "Control parameter setting method, substrate processing apparatus, and storage medium." This invention involves a control parameter setting method for film forming modules. It includes acquiring a first parameter group for controlling a film forming process in one module and a second parameter group for another module. The method also involves acquiring film thickness values from both modules and updating the parameter groups to minimize differences in film thickness.
Career Highlights
Kazuhiro Shiba is currently associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work focuses on enhancing the efficiency and precision of film forming processes, which are critical in semiconductor fabrication.
Conclusion
Kazuhiro Shiba's contributions to film forming technology exemplify the innovative spirit of modern inventors. His patent reflects a commitment to improving manufacturing processes in the semiconductor industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile