Company Filing History:

14 out of 8,898

Nikon Corporation

patents

1 out of 1,287

The University of Tokyo

patents

where one patent can have more than one assignee

Years Active: 1997-2015

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14 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9188878 - Driving system and driving method, exposure apparatus and exposure method, and driving system design method (2015-11-17),

2. 8805556 - Damping apparatus and exposure apparatus (2014-08-12),

3. 6744511 - Stage device having drive mechanism for driving a movable stage, and exposure apparatus and method of detecting position of the stage (2004-06-01),

4. 6606146 - Stage device, exposure apparatus incorporating the stage device, and method of using the same (2003-08-12),

5. 6509953 - Apparatus for exposing a pattern onto an object with controlled scanning (2003-01-21),

6. 6320345 - Command trajectory for driving a stage with minimal vibration (2001-11-20),

7. 6084244 - Scanning exposure apparatus that compensates for positional deviation (2000-07-04),

8. 6008610 - Position control apparatus for fine stages carried by a coarse stage on (1999-12-28),

9. 5920378 - Projection exposure apparatus (1999-07-06),

10. 5798822 - Exposure apparatus (1998-08-25),

11. 5777722 - Scanning exposure apparatus and method (1998-07-07),

12. 5715037 - Scanning exposure apparatus (1998-02-03),

13. 5657130 - Exposure apparatus and method (1997-08-12),

14. 5640227 - Exposure apparatus and exposure method for minimizing defocusing of the (1997-06-17),

Title: Innovations of Kazuaki Saiki: A Trailblazer in Driving Systems

Introduction: Kazuaki Saiki, based in Yokohama, Japan, is a leading inventor known for his remarkable contributions to driving systems and exposure apparatus technology. With an impressive portfolio of 14 patents, Saiki has pioneered innovative solutions that enhance the precision and performance of mechanical systems.

Latest Patents: Among his latest patents, Saiki has developed a driving system and method that utilizes dual interferometers to create a robust driving system for plate stages. This invention allows for precise control of a plate stage in high-bandwidth applications. Additionally, he designed a damping apparatus that stabilizes stage apparatus by applying strategic support forces, significantly reducing vibrations and tilting of the base plate.

Career Highlights: Saiki's career includes notable positions at Nikon Corporation, where he focused on advancing imaging technology, and The University of Tokyo, contributing to extensive research in the field of engineering. His inventions exhibit a deep understanding of mechanical principles and their applications in practical scenarios.

Collaborations: Throughout his career, Saiki has collaborated with esteemed professionals such as Hiroshi Shirasu and Tomohide Hamada. These partnerships have led to vital advancements in technology, reflecting a commitment to innovation and excellence in his field.

Conclusion: Kazuaki Saiki stands out as an accomplished inventor whose work has significantly impacted the areas of driving systems and exposure apparatuses. His patents not only demonstrate his ingenuity but also contribute to the ongoing evolution of technology in precision engineering.

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