This inventor holds 1 USPTO granted patent. Top assignee: Tokyo Electron Limited. Active years: 2021.
Company Filing History:
Years Active: 2021
Title: Katsuya Koga: Innovator in Substrate Processing Technology
Introduction
Katsuya Koga is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology. His innovative work has led to the development of a unique substrate processing apparatus.
Latest Patents
Koga holds a patent for a "Substrate processing apparatus and substrate processing apparatus assembling method." This patent describes a substrate processing system that includes multiple assemblies. Each assembly features a substrate processing apparatus that supplies a processing fluid to a substrate and processes it. Additionally, the system includes a fluid supply control apparatus that manages the flow of the processing fluid and a drive equipment apparatus that facilitates the movement of the fluid control device.
Career Highlights
Katsuya Koga is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing substrate processing technologies. Koga's innovative approach has garnered attention within the industry.
Collaborations
Koga collaborates with Mikio Nakashima, a fellow innovator in the field. Their partnership has contributed to the development of advanced technologies in substrate processing.
Conclusion
Katsuya Koga's contributions to substrate processing technology highlight his role as an influential inventor. His patent and work at Tokyo Electron Limited demonstrate his commitment to innovation in the industry.