The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Feb. 03, 2017
Applicant:
Tokyo Electron Limited, Minato-ku, JP;
Inventors:
Mikio Nakashima, Koshi, JP;
Katsuya Koga, Koshi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 3/02 (2006.01); B08B 3/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01); B08B 3/02 (2013.01); B08B 3/022 (2013.01); B08B 3/04 (2013.01); H01L 21/6708 (2013.01); H01L 21/6719 (2013.01); H01L 21/67253 (2013.01); B08B 2203/0229 (2013.01);
Abstract
A substrate processing system includes multiple assemblies framed and including such that each of the assemblies includes a substrate processing apparatus which supplies a processing fluid to a substrate and processes the substrate, a fluid supply control apparatus including a fluid control device which controls flow of the processing fluid supplied to the substrate processing apparatus, and a drive equipment apparatus including a drive device which drives movement of the fluid control device in the fluid supply control apparatus.