Company Filing History:
Years Active: 2002-2006
Title: Innovations of Katsutomo Terashima: Advancements in Excimer Laser Technology
Introduction
Katsutomo Terashima, a notable inventor based in Oyama, Japan, is recognized for his contributions in the field of excimer laser technology. With a total of three patents to his name, his work demonstrates significant advancements in the efficiency and performance of laser devices.
Latest Patents
Terashima's latest innovations include two pivotal patents concerning excimer lasers. The first patent focuses on an excimer laser device and gas, highlighting improvements in the burst and spike characteristics of excimer laser output during burst operations. This invention describes a system where xenon gas is efficiently added from a compact gas cylinder to enhance the performance of gases supplied from argon/neon and argon/fluorine/neon cylinders. A sensor detects the ratio of xenon gas, while a gas controller manages its supply, ensuring optimal operation.
The second patent revolves around an ArF excimer laser device, a scanning type exposure device, and an ultraviolet laser device. This innovation introduces a buffer gas primarily consisting of helium, with xenon gas added to improve performance. The design features a mixture piping system that enables the addition of trace amounts of xenon gas without modifying existing laser gas supply equipment, effectively remedying burst and spike characteristics.
Career Highlights
Katsutomo Terashima's career is marked by his tenure at Komatsu Corporation, where he has significantly impacted the development of laser technologies. His patents reflect an innovative approach to enhancing laser applications, demonstrating a strong commitment to advancing this field.
Collaborations
During his career, Terashima has collaborated with industry professionals, including esteemed coworkers Osamu Wakabayashi and Akira Sumitani. These collaborations contribute to the rich landscape of innovation in excimer laser technology, fostering an environment of creativity and shared knowledge.
Conclusion
Katsutomo Terashima is a distinguished inventor whose contributions to excimer laser technology represent significant advancements in this specialized field. His patents not only improve the efficiency of laser devices but also emphasize his inventive spirit and dedication to innovation. As he continues to work with Komatsu Corporation, the impact of his inventions will resonate within the industry, pushing the boundaries of what excimer lasers can achieve.