The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Sep. 26, 2000
Applicant:
Inventors:
Assignee:
Komatsu, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/223 ;
U.S. Cl.
CPC ...
H01S 3/223 ;
Abstract
Xenon gas is added from a small-sized Xe gas cylinder ( ) to the excimer laser gas inside a chamber ( ) supplied from an Ar/Ne gas cylinder ( ) and an Ar/Ne/F gas cylinder ( ), the xenon gas proportion is detected by an Xe gas sensor ( ), and the supply of the xenon gas supplied to the chamber ( ) from the Xe gas cylinder ( ) is controlled by a gas controller ( ).