Nirasaki, Japan

Katsushi Oikawa


Average Co-Inventor Count = 4.0

ph-index = 1


Company Filing History:


Years Active: 2024

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1 patent (USPTO):Explore Patents

Title: Innovator Katsushi Oikawa: Pioneering Film Forming Technology

Introduction: Katsushi Oikawa is a notable inventor based in Nirasaki, Japan, recognized for his contributions to the field of film forming technologies. With a focus on innovation and precision, he has developed a patent that significantly enhances the film forming process used in various applications.

Latest Patents: Oikawa holds a patent for a film forming apparatus and method that revolutionizes how thin films are deposited on substrates. The apparatus consists of a processing container, a substrate holder, a cathode unit, and a gas introducing mechanism to introduce a plasma generating gas. This advanced design features a target and power supply, along with a magnet driving part that oscillates and drives the magnet in a perpendicular direction, optimizing the sputtering process. The result is high-quality deposition of sputtered particles on substrates utilizing magnetron sputtering.

Career Highlights: Katsushi Oikawa is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics sector. His innovative approach and focus on improving efficiency in film formation have made him a valuable asset to the company and the industry as a whole.

Collaborations: Throughout his career, Oikawa has worked closely with talented colleagues, including Koji Maeda and Atsushi Shimada. Their collaboration has fostered an environment of creativity and innovation, leading to advancements in film forming technology.

Conclusion: Katsushi Oikawa's inventive spirit and dedication to advancing technology have resulted in significant contributions to the field of film forming. His patent is a testament to his ability to blend creativity with practical application, showcasing the importance of innovation in today's technological landscape.

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