Katsuichi Akiyoshi

Title: Katsuichi Akiyoshi: Innovator in Semiconductor Heat Treatment Technologies

Introduction

Katsuichi Akiyoshi is a notable inventor based in Kyoto, Japan. He has made significant contributions to the field of semiconductor technology, particularly in heat treatment methods. With a total of 3 patents to his name, Akiyoshi's work has advanced the efficiency and effectiveness of semiconductor processing.

Latest Patents

Akiyoshi's latest patents include a light irradiation type heat treatment method and a heat treatment apparatus that calculates the temperature of a substrate based on a treatment recipe applicable thereto. In this innovative method, a carrier containing multiple semiconductor wafers is transported into a heat treatment apparatus. A recipe specifying treatment procedures and conditions is set for each wafer. The reflectance of each wafer is measured, and based on the set recipe and measured reflectance, a predicted attainable temperature for each wafer during flash heating treatment is calculated and displayed. This allows for the easy setting of treatment conditions, enhancing the overall heat treatment process.

Another significant patent involves a light irradiation type heat treatment apparatus where the pressure in a chamber receiving a semiconductor wafer is reduced to below atmospheric pressure. The semiconductor wafer undergoes heat treatment in a reduced-pressure atmosphere by being irradiated with a flash of light. A leak determination part monitors the pressure in the chamber to detect any leaks without requiring additional hardware. This innovative approach simplifies the detection of leaks, ensuring the integrity of the heat treatment process.

Career Highlights

Throughout his career, Akiyoshi has worked with prominent companies in the semiconductor industry, including Screen Holdings Co., Ltd. and Dainippon Screen Mfg. Co., Ltd. His experience in these organizations has contributed to his expertise in semiconductor technologies and heat treatment methods.

Collaborations

Akiyoshi has collaborated with notable colleagues such as Mao Omori and Mitsukazu Takahashi. These collaborations have likely fostered innovation and the exchange of ideas within the semiconductor field.

Conclusion

Katsuichi Akiyoshi's contributions to semiconductor heat treatment technologies have made a significant impact on the industry. His innovative patents and career achievements reflect his dedication to advancing semiconductor processing methods.