IDiyas

For the Inventor, By the Inventor

Katsuta, Japan

Katsuhiro Kawasaki

USPTO Granted Patents = 6

Average Co-Inventor Count = 3.0

ph-index = 4

Forward Citations = 54(Granted Patents)


Location History:

  • Katsuta, JP (1985 - 1994)
  • Hitachi-Naka, JP (1998 - 2001)

Company Filing History:

goldMedal6 out of 42,485 
 
Hitachi, Ltd.
 patents

Years Active: 1985-2001

Loading Chart...
6 patents (USPTO):Explore Patents
1. 6225011 - Method for manufacturing semiconductor devices utilizing plurality of exposure systems (2001-05-01),
2. 5759423 - Electron beam writing method and apparatus for carrying out the same (1998-06-02),
3. 5326979 - Electron beam lithography system (1994-07-05),
4. 5209813 - Lithographic apparatus and method (1993-05-11),
5. 4710640 - Electron beam lithography (1987-12-01),
6. 4524277 - Charged particle beam apparatus (1985-06-18),
This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…