Katsuhiro Iino

Title: Katsuhiro Iino: Innovator in Bonding Technologies

Introduction

Katsuhiro Iino is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of bonding technologies, holding a total of 2 patents. His innovative approaches have paved the way for advancements in substrate bonding methods and cleaning systems.

Latest Patents

Iino's latest patents include a bonding method and bonding apparatus. This bonding method involves attracting and holding a first substrate with a first holder and a second substrate with a second holder. The process forms a combined substrate by moving the two holders relative to each other to bring the substrates into contact. The method also incorporates heating the substrates and cooling the combined substrate while controlling bending through a temperature difference.

Another notable patent is a cleaning device, peeling system, cleaning method, and computer-readable storage medium. This cleaning method effectively peels off an overlapped substrate and cleans the bonding surface of the substrate to be processed. It involves removing a protectant using a solvent and absorbing a peeling agent from the bonding surface.

Career Highlights

Katsuhiro Iino is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work focuses on developing innovative bonding and cleaning technologies that enhance production efficiency and product quality.

Collaborations

Iino collaborates with talented coworkers, including Osamu Hirakawa and Takashi Sakaue. Their combined expertise contributes to the advancement of technologies in their field.

Conclusion

Katsuhiro Iino's contributions to bonding technologies through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative methods continue to impact the industry positively.