Company Filing History:
Years Active: 2008
Title: **Inventor Spotlight: Karsten Zeiler**
Introduction
Karsten Zeiler, an innovative inventor based in Munich, Germany, has made significant contributions in the field of semiconductor technology. With two patents to his name, he exemplifies creativity and technical prowess in his work, particularly within the industry of advanced imaging systems.
Latest Patents
Zeiler's latest patents demonstrate his expertise in the projection of structure patterns onto semiconductor wafers. One patent focuses on a set of at least two masks coordinated with each other for the accurate projection of patterns into the same photosensitive layer. The first mask features a semitransparent first layer with an opening that exceeds the resolution limit of a projection system. The second mask, in contrast, includes a dummy structure with a smaller lateral dimension, ensuring both masks align perfectly for effective imaging.
Another notable patent is for an apparatus that enhances imaging quality while transferring line-space gratings alongside peripheral structures. This innovation utilizes quadrupole illumination with a specific arrangement of its poles, significantly improving contrast, Modulation Transfer Function, and the overall process window. The geometrical fidelity of peripheral structures, particularly within a broad depth of field range, is also notably stabilized.
Career Highlights
Karsten Zeiler has built a noteworthy career at Infineon Technologies AG, a leading player in the semiconductor industry. His work has pushed the boundaries of what is possible in photolithography and imaging technology, making a lasting impact on the way semiconductors are designed and manufactured.
Collaborations
Throughout his career, Zeiler has collaborated with talented colleagues, including Rainer Pforr and Mario Hennig. These collaborations have enriched his projects and have undoubtedly contributed to the innovative outcomes of his patents.
Conclusion
In summary, Karsten Zeiler stands out as a pioneering figure in the field of semiconductor technology. His contributions through his patents not only highlight his ingenuity but also enhance the capabilities of the industry. With a promising career at Infineon Technologies AG and valuable collaborations, Zeiler's work is likely to inspire future innovations in the realm of semiconductor engineering.